Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521866 | Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus | Seung-Yoon Song, Chan Hoon Park, Jong-Woo Sun, Jung-Mo Sung, Jin Young Park | 2022-12-06 |
| 11437264 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Jong-Woo Sun, Chan Hoon Park, Seung-Yoon Song, Seul Ha Myung | 2022-09-06 |