Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521828 | Inductively coupled plasma source | John Poulose | 2022-12-06 |
| 11508554 | High voltage filter assembly | Anurag Kumar Mishra, Leonid Dorf, Rajinder Dhindsa, Olivier Luere | 2022-11-22 |
| 11476145 | Automatic ESC bias compensation when using pulsed DC bias | Linying Cui, Leonid Dorf | 2022-10-18 |
| 11462388 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2022-10-04 |
| 11462389 | Pulsed-voltage hardware assembly for use in a plasma processing system | Leonid Dorf, Rajinder Dhindsa, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +5 more | 2022-10-04 |
| 11406062 | Agricultural harvester with a feeder house having a locking axle assembly | Steven John Schrag, Rex Schertz | 2022-08-09 |
| 11367593 | Apparatus and methods for manipulating radio frequency power at an edge ring in plasma process device | Linying Cui | 2022-06-21 |
| 11289310 | Circuits for edge ring control in shaped DC pulsed plasma process device | Linying Cui | 2022-03-29 |
| 11284500 | Method of controlling ion energy distribution using a pulse generator | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, Sunil Srinivasan, Anurag Kumar Mishra | 2022-03-22 |
| 11276601 | Apparatus and methods for manipulating power at an edge ring in a plasma processing device | Linying Cui | 2022-03-15 |
| 11232933 | Temperature and bias control of edge ring | Linying Cui, Rajinder Dhindsa | 2022-01-25 |