Issued Patents 2022
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538655 | Multi-beam inspection apparatus | Xuerang Hu, Zhong-Wei Chen, Weiming Ren | 2022-12-27 |
| 11513087 | Systems and methods for voltage contrast defect detection | Weiming Ren, Zhong-Wei Chen, Xiaoyu JI, Xiaoxue CHEN, Weimin Zhou +1 more | 2022-11-29 |
| 11469076 | System and method for scanning a sample using multi-beam inspection apparatus | Martinus Gerardus Maria Johannes Massen, Joost Jeroen Ottens, Long Ma, Youfei Jiang, Weihua Yin +1 more | 2022-10-11 |
| 11469074 | Multiple charged-particle beam apparatus with low crosstalk | Weiming Ren, Xuerang Hu, Qingpo Xi | 2022-10-11 |
| 11430631 | Methods of inspecting samples with multiple beams of charged particles | Kuo-Shih Liu, Wei Fang, Jack Jau | 2022-08-30 |
| 11398368 | Apparatus of plural charged-particle beams | Weiming Ren, Xuerang Hu, Zhongwei Chen | 2022-07-26 |
| 11328894 | Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus | Weiming Ren, Xuerang Hu, Xinan Luo, Zhongwei Chen | 2022-05-10 |
| 11302514 | Apparatus for multiple charged-particle beams | Weiming Ren, Xuerang Hu, Zong-wei Chen | 2022-04-12 |
| 11289304 | Apparatus using multiple beams of charged particles | Xuerang Hu, Weiming Ren, Zhong-Wei Chen | 2022-03-29 |
| 11282675 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Weiming Ren, Xuerang Hu, Zhong-Wei Chen | 2022-03-22 |
| 11232928 | Multi-beam inspection apparatus | Weiming Ren, Qian Zhang, Xuerang Hu | 2022-01-25 |
| 11217423 | Apparatus of plural charged-particle beams | Weiming Ren, Shuai Li, Zhongwei Chen, Jack Jau | 2022-01-04 |