Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527405 | In-die metrology methods and systems for process control | Lingling PU, Zhong-Wei Chen | 2022-12-13 |
| 11450122 | Methods and systems for defect inspection and review | — | 2022-09-20 |
| 11430631 | Methods of inspecting samples with multiple beams of charged particles | Kuo-Shih Liu, Xuedong Liu, Jack Jau | 2022-08-30 |
| 11416979 | Defect displaying method | Cho H. Teh, Ju Hao Chien, YI-YING WANG, Shih-Tsung Chen, Jian-Min Liao +5 more | 2022-08-16 |
| 11315237 | EBeam inspection method | — | 2022-04-26 |
| 11308635 | Method and apparatus for adaptive alignment | Lingling PU | 2022-04-19 |
| 11308602 | Cascade defect inspection | Zhichao Chen | 2022-04-19 |
| 11250559 | Inspection method and system | Zhao-Li Zhang, Jack Jau | 2022-02-15 |
| 11238579 | Defect pattern grouping method and system | Haili Zhang, Zhichao Chen, Shengcheng JIN | 2022-02-01 |
| 11216938 | Systems and methods of optimal metrology guidance | Lingling PU, Nan Zhao, Wentian ZHOU, Teng Wang, Ming Xu | 2022-01-04 |