Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538655 | Multi-beam inspection apparatus | Xuerang Hu, Xuedong Liu, Weiming Ren | 2022-12-27 |
| 11527405 | In-die metrology methods and systems for process control | Lingling PU, Wei Fang | 2022-12-13 |
| 11513087 | Systems and methods for voltage contrast defect detection | Weiming Ren, Xuedong Liu, Xiaoyu JI, Xiaoxue CHEN, Weimin Zhou +1 more | 2022-11-29 |
| 11479365 | Computer vision systems and methods for aiding landing decision | Gang He, Min Wu, Carl A. Dins | 2022-10-25 |
| 11289304 | Apparatus using multiple beams of charged particles | Xuerang Hu, Weiming Ren, Xuedong Liu | 2022-03-29 |
| 11282675 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Weiming Ren, Xuedong Liu, Xuerang Hu | 2022-03-22 |
| 11222766 | Multi-cell detector for charged particles | Joe Wang, Yongxin Wang, Xuerang Hu | 2022-01-11 |