Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527405 | In-die metrology methods and systems for process control | Wei Fang, Zhong-Wei Chen | 2022-12-13 |
| 11308635 | Method and apparatus for adaptive alignment | Wei Fang | 2022-04-19 |
| 11216938 | Systems and methods of optimal metrology guidance | Wei Fang, Nan Zhao, Wentian ZHOU, Teng Wang, Ming Xu | 2022-01-04 |