Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538655 | Multi-beam inspection apparatus | Xuedong Liu, Zhong-Wei Chen, Weiming Ren | 2022-12-27 |
| 11469074 | Multiple charged-particle beam apparatus with low crosstalk | Weiming Ren, Qingpo Xi, Xuedong Liu | 2022-10-11 |
| 11398368 | Apparatus of plural charged-particle beams | Weiming Ren, Xuedong Liu, Zhongwei Chen | 2022-07-26 |
| 11328894 | Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus | Weiming Ren, Xuedong Liu, Xinan Luo, Zhongwei Chen | 2022-05-10 |
| 11302514 | Apparatus for multiple charged-particle beams | Weiming Ren, Xuedong Liu, Zong-wei Chen | 2022-04-12 |
| 11289304 | Apparatus using multiple beams of charged particles | Weiming Ren, Xuedong Liu, Zhong-Wei Chen | 2022-03-29 |
| 11282675 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Weiming Ren, Xuedong Liu, Zhong-Wei Chen | 2022-03-22 |
| 11232928 | Multi-beam inspection apparatus | Weiming Ren, Qian Zhang, Xuedong Liu | 2022-01-25 |
| 11222766 | Multi-cell detector for charged particles | Joe Wang, Yongxin Wang, Zhong-Wei Chen | 2022-01-11 |