| 11537038 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Edwin Cornelis Kadijk, Sergei Shulepov |
2022-12-27 |
| 11469076 |
System and method for scanning a sample using multi-beam inspection apparatus |
Martinus Gerardus Maria Johannes Massen, Long Ma, Youfei Jiang, Weihua Yin, Wei Li +1 more |
2022-10-11 |
| 11385553 |
Metrology method, patterning device, apparatus and computer program |
Zili Zhou, Nitesh Pandey, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar +6 more |
2022-07-12 |
| 11378893 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2022-07-05 |
| 11281115 |
Lithographic apparatus and method |
Nicolaas Ten Kate, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Nino, Marinus Jan Remie +3 more |
2022-03-22 |
| 11275316 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal |
2022-03-15 |