Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11536654 | Scatterometer and method of scatterometry using acoustic radiation | Maxim PISARENCO, Alessandro Polo | 2022-12-27 |
| 11454887 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | — | 2022-09-27 |
| 11415900 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2022-08-16 |
| 11385553 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2022-07-12 |
| 11262661 | Metrology apparatus | Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler, Hugo Augustinus Joseph Cramer +4 more | 2022-03-01 |