Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467504 | Piezoelectric actuator, actuator system, substrate support, and lithographic apparatus including the actuator | Bas JANSEN, Alexander Pascal Dijkshoorn | 2022-10-11 |
| 11467505 | Height sensor, lithographic apparatus and method for manufacturing devices | Johannes Petrus Martinus Bernardus Vermeulen, Marinus Petrus REIJNDERS | 2022-10-11 |
| 11302512 | Electron beam inspection apparatus stage positioning | Marcel Koenraad Marie Baggen, Antonius Henricus Arends, Lucas KUINDERSMA, Johannes Hubertus Antonius Van De Rijdt, Peter Paul HEMPENIUS +5 more | 2022-04-12 |
| 11269262 | Frame assembly, lithographic apparatus and device manufacturing method | Joep Sander De Beer, Cornelius Adrianus Lambertus De Hoon, Jeroen Pieter Starreveld, Martinus Van Duijnhoven, Maurice Willem Jozef Etiënne Wijckmans | 2022-03-08 |
| 11262661 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hugo Augustinus Joseph Cramer +4 more | 2022-03-01 |