Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467505 | Height sensor, lithographic apparatus and method for manufacturing devices | Hans Butler, Johannes Petrus Martinus Bernardus Vermeulen | 2022-10-11 |
| 11262661 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler +4 more | 2022-03-01 |
| 11221565 | Level sensor and lithographic apparatus | Simon Reinald HUISMAN | 2022-01-11 |