Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11474435 | Metrology sensor, illumination system and method of generating measurement illumination with a configurable illumination spot diameter | Sebastianus Adrianus GOORDEN, Sergei Sokolov | 2022-10-18 |
| 11409206 | Alignment method and apparatus | Sebastianus Adrianus GOORDEN | 2022-08-09 |
| 11360399 | Metrology sensor for position metrology | Sebastianus Adrianus GOORDEN, Simon Gijsbert Josephus Mathijssen, Henricus Petrus Maria Pellemans | 2022-06-14 |
| 11333985 | Position sensor | Sebastianus Adrianus GOORDEN, Duygu Akbulut, Alessandro Polo, Johannes Antonius Gerardus Akkermans, Arie Jeffrey Den Boef | 2022-05-17 |
| 11300892 | Sensor apparatus and method for lithographic measurements | Alessandro Polo | 2022-04-12 |
| 11221565 | Level sensor and lithographic apparatus | Marinus Petrus REIJNDERS | 2022-01-11 |