Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11536654 | Scatterometer and method of scatterometry using acoustic radiation | Maxim PISARENCO, Nitesh Pandey | 2022-12-27 |
| 11428925 | Position metrology apparatus and associated optical elements | Arjan Johannes Anton Beukman, Henricus Petrus Maria Pellemans, Nitish Kumar | 2022-08-30 |
| 11333985 | Position sensor | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Duygu Akbulut, Johannes Antonius Gerardus Akkermans, Arie Jeffrey Den Boef | 2022-05-17 |
| 11300892 | Sensor apparatus and method for lithographic measurements | Simon Reinald HUISMAN | 2022-04-12 |