Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11474435 | Metrology sensor, illumination system and method of generating measurement illumination with a configurable illumination spot diameter | Simon Reinald HUISMAN, Sergei Sokolov | 2022-10-18 |
| 11409206 | Alignment method and apparatus | Simon Reinald HUISMAN | 2022-08-09 |
| 11360399 | Metrology sensor for position metrology | Simon Reinald HUISMAN, Simon Gijsbert Josephus Mathijssen, Henricus Petrus Maria Pellemans | 2022-06-14 |
| 11333985 | Position sensor | Simon Reinald HUISMAN, Duygu Akbulut, Alessandro Polo, Johannes Antonius Gerardus Akkermans, Arie Jeffrey Den Boef | 2022-05-17 |