Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11391677 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Stefan Michiel Witte, Gijsbert Simon Matthijs Jansen, Lars Christian Freisem, Kjeld Sijbrand Eduard Eikema | 2022-07-19 |
| 11360399 | Metrology sensor for position metrology | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Henricus Petrus Maria Pellemans | 2022-06-14 |
| 11300883 | Method to determine a patterning process parameter | Martin Jacobus Johan Jak, Kaustuve Bhattacharyya, Won-Jae Jang, Jinmoo Byun | 2022-04-12 |