Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11474435 | Metrology sensor, illumination system and method of generating measurement illumination with a configurable illumination spot diameter | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN | 2022-10-18 |