Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467505 | Height sensor, lithographic apparatus and method for manufacturing devices | Hans Butler, Marinus Petrus REIJNDERS | 2022-10-11 |
| 11422477 | Vibration isolation system and lithographic apparatus | Roy Hendrikus Emilie Maria Jacobs, Cornelius Adrianus Lambertus De Hoon, Jeroen Pieter Starreveld | 2022-08-23 |
| 11347142 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more | 2022-05-31 |
| 11231646 | Pellicle and pellicle assembly | David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more | 2022-01-25 |