Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467486 | Graphene pellicle lithographic apparatus | Evgenia KURGANOVA, Alexander Ludwig KLEIN, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom, Mária Péter +4 more | 2022-10-11 |
| 11287737 | Metal-silicide-nitridation for stress reduction | Pieter-Jan Van Zwol, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom +4 more | 2022-03-29 |
| 11231646 | Pellicle and pellicle assembly | David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Johannes Joseph Janssen, Paul Janssen +18 more | 2022-01-25 |