Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467486 | Graphene pellicle lithographic apparatus | Evgenia KURGANOVA, Adrianus Johannes Maria Giesbers, Alexander Ludwig KLEIN, Maxim Aleksandrovich Nasalevich, Mária Péter +4 more | 2022-10-11 |
| 11347142 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more | 2022-05-31 |
| 11314163 | Pellicle frame and pellicle assembly | Anton Wilhelmus Duys, Maxim Aleksandrovich Nasalevich, Mária Péter, Pieter-Jan Van Zwol, David Ferdinand Vles | 2022-04-26 |
| 11287737 | Metal-silicide-nitridation for stress reduction | Pieter-Jan Van Zwol, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich +4 more | 2022-03-29 |
| 11231646 | Pellicle and pellicle assembly | David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more | 2022-01-25 |