Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422477 | Vibration isolation system and lithographic apparatus | Roy Hendrikus Emilie Maria Jacobs, Jeroen Pieter Starreveld, Johannes Petrus Martinus Bernardus Vermeulen | 2022-08-23 |
| 11269262 | Frame assembly, lithographic apparatus and device manufacturing method | Hans Butler, Joep Sander De Beer, Jeroen Pieter Starreveld, Martinus Van Duijnhoven, Maurice Willem Jozef Etiënne Wijckmans | 2022-03-08 |