Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467504 | Piezoelectric actuator, actuator system, substrate support, and lithographic apparatus including the actuator | Bas JANSEN, Hans Butler | 2022-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467504 | Piezoelectric actuator, actuator system, substrate support, and lithographic apparatus including the actuator | Bas JANSEN, Hans Butler | 2022-10-11 |