Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537038 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Sergei Shulepov | 2022-12-27 |
| 11430678 | Particle beam inspection apparatus | Jeroen Gerard Gosen, Te-Yu Chen, Dennis Herman Caspar Van Banning, Martijn Petrus Christianus Van Heumen, Erheng WANG +1 more | 2022-08-30 |