Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501973 | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures | Mark Olstad, Jose Alexandro Romero, Dong Li, Ward Johnson, Peijun Chen | 2022-11-15 |
| 11473195 | Semiconductor processing apparatus and a method for processing a substrate | David Marquardt, Thomas Aswad | 2022-10-18 |
| 11430656 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Raija H. Matero, Eva Tois, Hidemi Suemori +2 more | 2022-08-30 |
| 11398382 | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode | Moataz Bellah Mousa, Peng-Fu Hsu, Ward Johnson | 2022-07-26 |
| 11270899 | Wafer handling chamber with moisture reduction | Ward Johnson | 2022-03-08 |
| 11242598 | Structures including metal carbide material, devices including the structures, and methods of forming same | Michael Eugene Givens, Eric James Shero | 2022-02-08 |