Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469098 | Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures | Fu Tang, Delphine Longrie | 2022-10-11 |
| 11411088 | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures | Fu Tang, Michael Eugene Givens, Qi Xie | 2022-08-09 |
| 11398382 | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode | Moataz Bellah Mousa, Ward Johnson, Petri Raisanen | 2022-07-26 |