Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473195 | Semiconductor processing apparatus and a method for processing a substrate | Petri Raisanen, Thomas Aswad | 2022-10-18 |
| 11377737 | Manifolds for uniform vapor deposition | — | 2022-07-05 |