Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501973 | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures | Petri Raisanen, Mark Olstad, Dong Li, Ward Johnson, Peijun Chen | 2022-11-15 |