| 11186771 |
Etching solution for selectively removing silicon nitride during manufacture of a semiconductor device |
Wen Dar Liu |
2021-11-30 |
| 11180697 |
Etching solution having silicon oxide corrosion inhibitor and method of using the same |
Wen Dar Liu, Chung-Yi Chang |
2021-11-23 |
| 11175587 |
Stripper solutions and methods of using stripper solutions |
Jhih Kuei Ge, Wen Dar Liu, Chi-Hsien Kuo |
2021-11-16 |
| 11091727 |
Post etch residue cleaning compositions and methods of using the same |
Laisheng Sun, Lili Wang, Aiping Wu |
2021-08-17 |
| 11035044 |
Etching solution for tungsten and GST films |
Wen Dar Liu, Laisheng Sun, Tianniu Chen, Gang C. Han-Adebekun |
2021-06-15 |
| 11017995 |
Composition for TiN hard mask removal and etch residue cleaning |
Chao-Hsiang Chen, Wen Dar Liu, Chung-Yi Chang |
2021-05-25 |
| 10961118 |
Wafer level integrated MEMS device enabled by silicon pillar and smart cap |
Chin-Min Lin, Cheng San Chou, Hsiang-Fu Chen, Wen-Chuan Tai, Ching-Kai Shen +2 more |
2021-03-30 |
| 10954480 |
Compositions and methods for preventing collapse of high aspect ratio structures during drying |
Jhih Kuei Ge, Wen Dar Liu, Tianniu Chen |
2021-03-23 |
| 10934485 |
Etching solution for selectively removing silicon over silicon-germanium alloy from a silicon-germanium/ silicon stack during manufacture of a semiconductor device |
Wen Dar Liu, Andrew J. Adamczyk |
2021-03-02 |
| 10934484 |
Etching solution for selectively removing silicon-germanium alloy from a silicon-germanium/ germanium stack during manufacture of a semiconductor device |
Wen Dar Liu |
2021-03-02 |
| 10899608 |
Wafer level integrated MEMS device enabled by silicon pillar and smart cap |
Chin-Min Lin, Cheng San Chou, Hsiang-Fu Chen, Wen-Chuan Tai, Ching-Kai Shen +2 more |
2021-01-26 |
