Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062906 | Silicon implantation in substrates and provision of silicon precursor compositions therefor | Ying Tang, Joseph D. Sweeney, James J. Mayer, Richard S. Ray, Oleg Byl +2 more | 2021-07-13 |
| 11035044 | Etching solution for tungsten and GST films | Wen Dar Liu, Laisheng Sun, Yi-Chia Lee, Gang C. Han-Adebekun | 2021-06-15 |
| 10954480 | Compositions and methods for preventing collapse of high aspect ratio structures during drying | Jhih Kuei Ge, Yi-Chia Lee, Wen Dar Liu | 2021-03-23 |