Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139145 | Ion implantation system with mixture of arc chamber materials | Ying Tang, Sharad N. Yedave, Joseph R. Despres, Oleg Byl | 2021-10-05 |
| 11062906 | Silicon implantation in substrates and provision of silicon precursor compositions therefor | Ying Tang, Tianniu Chen, James J. Mayer, Richard S. Ray, Oleg Byl +2 more | 2021-07-13 |
| 10920087 | Hydrogenated isotopically enriched boront trifluoride dopant source gas composition | Steven E. Bishop, Sharad N. Yedave, Oleg Bly, Ying Tang | 2021-02-16 |
| 10892137 | Ion implantation processes and apparatus using gallium | Joseph R. Despres, Ying Tang, Sharad N. Yedave, Edward E. Jones, Oleg Byl | 2021-01-12 |