Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11091727 | Post etch residue cleaning compositions and methods of using the same | Yi-Chia Lee, Lili Wang, Aiping Wu | 2021-08-17 |
| 11035044 | Etching solution for tungsten and GST films | Wen Dar Liu, Yi-Chia Lee, Tianniu Chen, Gang C. Han-Adebekun | 2021-06-15 |