Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10961118 | Wafer level integrated MEMS device enabled by silicon pillar and smart cap | Yi-Chia Lee, Chin-Min Lin, Hsiang-Fu Chen, Wen-Chuan Tai, Ching-Kai Shen +2 more | 2021-03-30 |
| 10899608 | Wafer level integrated MEMS device enabled by silicon pillar and smart cap | Yi-Chia Lee, Chin-Min Lin, Hsiang-Fu Chen, Wen-Chuan Tai, Ching-Kai Shen +2 more | 2021-01-26 |