CC

Chao-Hsiang Chen

VU Versum Materials Us: 1 patents #31 of 64Top 50%
Overall (2021): #504,029 of 548,734Top 95%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11017995 Composition for TiN hard mask removal and etch residue cleaning Yi-Chia Lee, Wen Dar Liu, Chung-Yi Chang 2021-05-25