Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101173 | Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using same | Robert D. Clark, Jeffrey Smith, Kandabara Tapily, Angelique Raley | 2021-08-24 |
| 10978278 | Normal-incident in-situ process monitor sensor | Ching-Ling Meng, Holger Tuitje, Hanyou Chu, Xinkang Tian | 2021-04-13 |
| 10916472 | Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using same | Robert D. Clark, Jeffrey Smith, Kandabara Tapily, Angelique Raley | 2021-02-09 |