Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978278 | Normal-incident in-situ process monitor sensor | Ching-Ling Meng, Holger Tuitje, Qiang Zhao, Hanyou Chu | 2021-04-13 |
| 10910201 | Synthetic wavelengths for endpoint detection in plasma etching | Yan Chen, Vi Vuong | 2021-02-02 |