Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978278 | Normal-incident in-situ process monitor sensor | Ching-Ling Meng, Qiang Zhao, Hanyou Chu, Xinkang Tian | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978278 | Normal-incident in-situ process monitor sensor | Ching-Ling Meng, Qiang Zhao, Hanyou Chu, Xinkang Tian | 2021-04-13 |