Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910201 | Synthetic wavelengths for endpoint detection in plasma etching | Yan Chen, Xinkang Tian | 2021-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910201 | Synthetic wavelengths for endpoint detection in plasma etching | Yan Chen, Xinkang Tian | 2021-02-02 |