Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155918 | Film forming apparatus | — | 2021-10-26 |
| 11136669 | Film formation apparatus | Takeshi Kobayashi, Toshiyuki Nakatsubo | 2021-10-05 |
| 11118265 | Film deposition method and computer program storage medium | Shigenori Ozaki, Takeshi Kumagai | 2021-09-14 |
| 11118267 | Substrate processing method | Toshiyuki Nakatsubo, Takeshi Kobayashi, Tomoya Hasegawa | 2021-09-14 |
| 11085113 | Film forming method and recording medium | Shigehiro Miura, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2021-08-10 |
| 11075074 | Method for depositing a silicon nitride film and film deposition apparatus | Yutaka Takahashi, Kazumi Kubo | 2021-07-27 |
| 10974100 | Racket and grommet | Naoto Ogawa, Masato Kawabata, Tsutomu Takahashi | 2021-04-13 |
| 10920316 | Substrate processing apparatus | — | 2021-02-16 |