TH

Tomoya Hasegawa

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #229,588 of 548,734Top 45%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11118267 Substrate processing method Hitoshi Kato, Toshiyuki Nakatsubo, Takeshi Kobayashi 2021-09-14