Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11136669 | Film formation apparatus | Hitoshi Kato, Takeshi Kobayashi | 2021-10-05 |
| 11118267 | Substrate processing method | Hitoshi Kato, Takeshi Kobayashi, Tomoya Hasegawa | 2021-09-14 |