SO

Shigenori Ozaki

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #261,141 of 548,734Top 50%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11118265 Film deposition method and computer program storage medium Hitoshi Kato, Takeshi Kumagai 2021-09-14