Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170999 | Deposition method | Yutaka Takahashi, Takayuki Karakawa | 2021-11-09 |
| 11075074 | Method for depositing a silicon nitride film and film deposition apparatus | Hitoshi Kato, Yutaka Takahashi | 2021-07-27 |