Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201053 | Film forming method and film forming apparatus | Noriaki Fukiage, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa +3 more | 2021-12-14 |
| 11170999 | Deposition method | Kazumi Kubo, Yutaka Takahashi | 2021-11-09 |