AK

Akihiro Kuribayashi

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #542,143 of 548,734Top 100%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11201053 Film forming method and film forming apparatus Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Takeshi Oyama, Jun Ogawa +3 more 2021-12-14