Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201053 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Jun Ogawa +3 more | 2021-12-14 |
| 11171014 | Substrate processing method and substrate processing apparatus | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage +2 more | 2021-11-09 |