Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201053 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama +3 more | 2021-12-14 |
| 11171014 | Substrate processing method and substrate processing apparatus | Hideomi HANE, Kentaro Oshimo, Jun Ogawa, Noriaki Fukiage, Hiroaki Ikegawa +2 more | 2021-11-09 |
| 10900121 | Method of manufacturing semiconductor device and apparatus of manufacturing semiconductor device | Noriaki Fukiage, Kentaro Oshimo, Hideomi HANE, Jun Ogawa, Hiroaki Ikegawa | 2021-01-26 |