Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171014 | Substrate processing method and substrate processing apparatus | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage +2 more | 2021-11-09 |
| 10900121 | Method of manufacturing semiconductor device and apparatus of manufacturing semiconductor device | Noriaki Fukiage, Kentaro Oshimo, Shimon Otsuki, Hideomi HANE, Jun Ogawa | 2021-01-26 |