Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131023 | Film deposition apparatus and film deposition method | Jun Sato | 2021-09-28 |
| 11118264 | Plasma processing method and plasma processing apparatus | — | 2021-09-14 |
| 11085113 | Film forming method and recording medium | Hitoshi Kato, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2021-08-10 |