KA

Katsuyoshi Aikawa

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #384,935 of 548,734Top 75%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11085113 Film forming method and recording medium Hitoshi Kato, Shigehiro Miura, Hiroyuki Kikuchi 2021-08-10