Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201089 | Robust low-k bottom spacer for VFET | Hiroaki Niimi, Kangguo Cheng | 2021-12-14 |
| 11183583 | Vertical transport FET with bottom source and drain extensions | Shogo Mochizuki | 2021-11-23 |
| 10937890 | Vertical field-effect transistor late gate recess process with improved inter-layer dielectric protection | Wenyu Xu, Ruilong Xie, Hemanth Jagannathan | 2021-03-02 |
| 10916627 | Nanosheet transistor with fully isolated source and drain regions and spacer pinch off | Nicolas Loubet | 2021-02-09 |