Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982346 | Integrated elastomeric lipseal and cup bottom for reducing wafer sticking | Aaron Berke, Robert Rash, Steven T. Mayer, Santosh Kumar | 2021-04-20 |
| 10954605 | Protecting anodes from passivation in alloy plating systems | Steven T. Mayer, David W. Porter, Thomas A. Ponnuswamy | 2021-03-23 |
| 10923340 | Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity | Burhanuddin Kagajwala, Bryan L. Buckalew, Aaron Berke, Robert Rash, Steven T. Mayer | 2021-02-16 |